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发明名称
MANUFACTURE OF SEMICONDUCTOR ELEMENT
摘要
申请公布号
JPH0236531(A)
申请公布日期
1990.02.06
申请号
JP19880186564
申请日期
1988.07.26
申请人
NEC CORP
发明人
SASAKI TATSUYA
分类号
H01L21/306;H01S5/00
主分类号
H01L21/306
代理机构
代理人
主权项
地址
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