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发明名称
FLATTENING MATERIAL AND METHOD
摘要
申请公布号
JPH0232540(A)
申请公布日期
1990.02.02
申请号
JP19880181505
申请日期
1988.07.22
申请人
NEC CORP
发明人
SUGITO SHIGEYUKI
分类号
B05D1/40;B05D7/00;B05D7/24;C08G59/40;C09D163/00;C09D163/04;H01L21/302;H01L21/3065
主分类号
B05D1/40
代理机构
代理人
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