| 摘要 |
PURPOSE:To make the height dimension of an apparatus small and to make the balance of mechanism good by providing a deformation member between ring external and internal rigid bodies and by constituting a single axis inching mechanism. CONSTITUTION:An inching mechanism is composed of a flat ring external rigid body 21 with a stepped part 21a formed at the under surface periphery, a ring internal rigid body 22 with a stepped part 22a formed at the top surface periphery, flat plate elastic members 23a, 24b combining both rigid bodies, a piezoelectric actuator 27 mounted between said both rigid bodies 21, 22, and a strain gauge 28. Then, when voltage is applied to the piezoelectric actuator 27 in a state where said external rigid body 21 is fixed, said actuator is extended so that an upward force is applied to the internal rigid body 22. In this manner, said elastic members 23a, 24b are deformed and the internal rigid body 22 is displaced in the direction shown by the arrow U. Said displacement quantity is detected by the strain gauge 28 to be feedback controlled. When said two single axis inching mechanisms 20X, 20Y are connected, it is possible to constitute a biaxial inching mechanism. |
