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发明名称
APPARATUS FOR TESTING SEMICONDUCTOR WAFER
摘要
申请公布号
JPH0231169(A)
申请公布日期
1990.02.01
申请号
JP19880181029
申请日期
1988.07.19
申请人
NEC CORP
发明人
TSURUTA HIROKI
分类号
G01R1/073;H01B1/20;H01L21/66
主分类号
G01R1/073
代理机构
代理人
主权项
地址
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