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经营范围
发明名称
RASTERELEKTRONENMIKROSKOP
摘要
申请公布号
DE3924605(A1)
申请公布日期
1990.02.01
申请号
DE19893924605
申请日期
1989.07.25
申请人
HITACHI, LTD., TOKIO/TOKYO, JP
发明人
SATO, MITSUGU, KATSUTA, JP
分类号
H01J37/04;G01C5/04;H01J37/147;H01J37/28;H04N13/00
主分类号
H01J37/04
代理机构
代理人
主权项
地址
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