| 摘要 |
PURPOSE:To enable production of AlN sintered compact having excellent surface smoothness in equalized contraction of AlN molded article and spacer by advance of sintering by using AlN molded article as a spacer for holding the upper lid of setter. CONSTITUTION:A molded article 2 of AlN based powder is mounted on a setter 4 and a spacer 3 prepared by subjecting AlN based powder to pressure molding is placed on the setter 4 and an upper lid 1 is mounted on the spacer 3 to provide the AlN sintered compact. |
