发明名称 MULTI-LAYER PROTECTING COAT OF A SUBSTRATE AND METHOD FOR PROTECTING A SUBSTRATE BY PLASMA SPUTTERING OF SUCH A COAT
摘要 The present invention relates to a multilayer protective coating for a substrate and a process for protecting a substrate by the deposition of a continuous, transparent, amorphous, inorganic coating essentially comprising silicon, carbon, nitrogen, oxygen and hydrogen by means of a plasma. The invention also concerns the application of the coatings according to the invention in the protection of substrates and in particular against electrostatic charges.
申请公布号 JPH0230764(A) 申请公布日期 1990.02.01
申请号 JP19890116214 申请日期 1989.05.11
申请人 L'AIR LIQUIDE 发明人 JIYANNMARII GOOCHIE;FURANSOWA KUURE;KUROODO BONE
分类号 C03C17/34;C23C16/02;C23C16/30;G11B5/72;G11B7/24;G11B7/254;G11B7/257 主分类号 C03C17/34
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