MIKROWELLEN-PLASMA-AETZVORRICHTUNG.,申请号DE19853575047-传众专利搜索

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发明名称	MIKROWELLEN-PLASMA-AETZVORRICHTUNG.
摘要
申请公布号	DE3575047(D1)	申请公布日期	1990.02.01
申请号	DE19853575047	申请日期	1985.07.23
申请人	FUJITSU LTD., KAWASAKI, KANAGAWA, JP	发明人	FUJIMURA, SHUZO C/O FUJITSU LIMITED, NAKAHARA-KU KAWASAKI-SHI, 211, JP
分类号	H01L21/302;H01J37/305;H01J37/32;H01L21/145;H01L21/3065;(IPC1-7):H01J37/32;H05H1/46	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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