| 摘要 |
PURPOSE:To make it possible to quickly stabilize pressure fluctuation by providing a means of adding, as a feed forward signal, a change rate signal of the consumption of an output gas to the operating output of a pressure controller. CONSTITUTION:An adding means 25 is provided to add, as a feed forward signal, a change rate signal of the consumption of an output gas to the operating output of a pressure controller 24. A set value controller 33 is installed, which transmits the output of the adding means 25 as a set value, the sum total of a set value by a flow controller 23 and the measured value of the flow of offgas as a measured value, their deviation as a control calculation and a common set value of each flow controller as an operating output. A changeover switch means 26 supplies the operating output of the set value controller 33 or the output of a 0% set value transmitter 35 to a flow controller 32 through a change rate control means 37. A parameter change means 38 changes the control calculation parameter of the set value controller 33 in accordance with the number of heat exchangers in operation. |
