Process for producing iron garnet coatings.

摘要

Process for producing iron garnet layers having refractive indices n and lattice constants ao adjusted to defined values, the layers being deposited by means of HF-cathodic sputtering on a substrate, using a target predominantly containing a garnet phase in addition to residual phases of almost the same sputtering rate, in rare gas plasma of an ion energy of the ions, which bombard the growing layer, of less than 10<2> eV and at a pressure in the range from 0.1 to 2.0 Pa, the rare gas being doped with up to 5 % by volume of at least one reactive gas. ……