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发明名称
ANORDNUNG ZUR PRUEFUNG VON SCHALTUNGSMUSTERN AUF FOTOMASKEN
摘要
申请公布号
DD275750(A1)
申请公布日期
1990.01.31
申请号
DD19880320016
申请日期
1988.09.13
申请人
VEB CARL ZEISS JENA,DD
发明人
GUTSCHE,GERALD,DD;DEGEL,BERNHARD,DD;DRESSLER,THOMAS,DD;GRAEF,MICHAEL,DD
分类号
G03F9/00;(IPC1-7):G03F9/00
主分类号
G03F9/00
代理机构
代理人
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地址
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