| 摘要 |
PURPOSE:To enable the alignment to be made normally in a lithographic process to form a wiring to be connected to a conductive layer by a method wherein an alignment mark is formed using a recession provided in the second insulating layer covering the conductive layer and a first insulating layer. CONSTITUTION:In the title semiconductor integrated circuit device composed of a conductive layer 5, the first insulating film 2 adjacent to the conductive layer 5, the second insulating layer 7 covering the conductive layer 5 and the first insulating layer 2, a contact hole C provided on the part corresponding to the conductive layer 5 out of the second insulating layer 7 and an alignment mark M, the alignment mark M is constituted at least of a recession provided in the second insulating layer 7. For example, the interlayer insulating film 7 is etched away by RIE process to form a contact hole C on the diffused layer 5 simultaneously the alignment mark M is formed on the insulating film 2. Finally, the selective CVD of W is performed by reduction-reacting WF6 to selectively deposit W only inside the contact hole C to form an Al wiring 10 later. |
