发明名称 METHOD OF SELECTIVELY DEPOSITING METAL LAYERS ON A SUBSTRATE
摘要 Selected areas of a metal substrate are coated by first coating the area, with a removable protective area, blanket coating the surface of the substrate with a heavy metal film, heating to diffuse and alloy the heavy metal film and removing the heavy metal film from the non-protected area and also removing the protective layer and overlaying heavy metal film from the selected areas. Also claimed is a process of selectively coating gold on exposed metal areas. The process is used to deposit metal onto a selected portion of a pattern on a ceramic substrate carrier of the type used for mounting semiconductor.
申请公布号 KR900000438(B1) 申请公布日期 1990.01.30
申请号 KR19850007591 申请日期 1985.10.15
申请人 IBM 发明人 HERON LESTER W.;KUMMA ANANDA H.IRO;NUFER ROBERT W.
分类号 H01L23/12;C23C10/04;H01L21/388;H01L21/48;H05K1/03;H05K1/09;H05K3/24;(IPC1-7):H01L21/48 主分类号 H01L23/12
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