| 摘要 |
PURPOSE:To prevent a deterioration in use by forming a ceramic system superconductor thin film on the surface of a base material, shaping an anodic oxide film and forming a wiring board by laser scribing. CONSTITUTION:After both the faces of an article composed of a ceramic base material 1 of a required shape is degreased, superconductor thin films 2-1, 2-2 (for example, La-Sr-Cu-O, Y-Ba-Cu-O system or organic substance system) is formed by a laser dry type film forming method. Positive bias voltage is applied and required film-thickness is deposited on the surface of an article made of ceramic in which the thin films 2-1, 2-2 is formed by oxygen negative ion generated by plasma. The oxygen negative ions are deposited on the surface of the base material 1 to be an anodic oxide films 3-1, 3-2. A laser beam is radiated to form a pattern. Thereby a deterioration in use can be prevented. |
