| 摘要 |
PURPOSE:To improve energy resolution by applying the magnetic field in inverse proportion to the square root of the distance from the center point, not the uniform magnetic field, to a magnet for deflecting the proton orbit to determine the energy spectrum. CONSTITUTION:A surface analyzer is constituted of an ion source 1, a magnet 2, a slit 32, an accelerating/decelerating tube 3, an extremely high-vacuum chamber 4, a channeltron 8 measuring the number of incident protons or a position detector 7 measuring the position of incident protons and the number of protons. The magnetic field in proportion to 1/r<1/2> is applied to the magnet 2 in the face direction of the magnet and the perpendicular direction, where (r) is the distance from the center point O, the deflection angle phi between the incident side OW and the outgoing side OG with respect to the center point O is 254.6 deg.+ or -8.1, the protons with the reference energy E<0>a are moved along a circular arc with r=R along a circle with a radius R determined by OW=OG=R. Energy resolution is thereby improved. |
