| 摘要 |
<p>PURPOSE:To display a half tone, and also, to contain a driving circuit in the same substrate by making a crystallinity of a TFT of a channel part of a picture element part lower than a crystallinity of a driving part, and a source and a drain of the picture element part. CONSTITUTION:A source 2, a drain 3 and a channel area 4 of a peripheral driving part are constituted of polycrystalline silicone (Poly-Si), and a source 2 and a drain 3 of a picture element part, a channel area 5 are constituted of poly-Si, and amorphous silicon (a-Si), respectively. A TFT of a peripheral driving circuit has large carrier mobility, and the circuit is driven easily and can be contained on the same substrate. Also, since the channel area 5 of the picture element part is formed by a-Si, the carrier movement is small, but since the resistivity is >=10<7>OMEGAcm, a leak current is small as 10<-12>A, and a half tone can be displayed.</p> |
