FORMING METHOD FOR INTEGRATED CIRCUIT PATTERN,申请号JP19880176980-传众专利搜索

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发明名称	FORMING METHOD FOR INTEGRATED CIRCUIT PATTERN
摘要
申请公布号	JPH0227749(A)	申请公布日期	1990.01.30
申请号	JP19880176980	申请日期	1988.07.18
申请人	FUJITSU LTD	发明人	SATO SHINJI
分类号	H01L27/118;H01L21/82	主分类号	H01L27/118
代理机构		代理人
主权项
地址

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