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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0226054(A)
申请公布日期
1990.01.29
申请号
JP19880175974
申请日期
1988.07.14
申请人
MATSUSHITA ELECTRON CORP
发明人
OZAKI HIDETO
分类号
H01L21/768;H01L21/316
主分类号
H01L21/768
代理机构
代理人
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地址
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