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发明名称
SPUTTERING METHOD
摘要
申请公布号
JPH0225566(A)
申请公布日期
1990.01.29
申请号
JP19880175543
申请日期
1988.07.14
申请人
TOYOBO CO LTD
发明人
KUMANO KATSUFUMI;IZEKI SEIJI;KANAIZUKA TADAHITO
分类号
C23C14/35
主分类号
C23C14/35
代理机构
代理人
主权项
地址
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