摘要 |
PURPOSE:To improve the S/N of an X-ray spectroscopic analysis by decreasing the background value by bremsstraklung of incident electron on a sample. CONSTITUTION:The X-rays emitted from the sample S excited by the irradiation of the electron rays D are spectrally split by a spectral crystal 1 and are then detected by an X-ray detector 2. The output signal thereof passes a delay circuit 5 and is inputted to a linear gate 7. Auger electrons are detected by a energy analyzer 3 and an electron detector 4 and the output thereof is sent via a counter 10 to a recorder 11 and is sent to a gate circuit 6. The linear gate 7 sends the signal sent to the delay circuit 5 by a gate open signal from the gate circuit 6 to a counter 8. The transmission of the X-ray detection signal is delayed by the delay circuit 5 in order to allow the detection time of the Auger electrons and the detection time of the X-ray detector of the time zone desired to be measured to coincide with each other. |