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发明名称
COATING APPARATUS
摘要
申请公布号
JPH0226668(A)
申请公布日期
1990.01.29
申请号
JP19880176077
申请日期
1988.07.13
申请人
HITACHI LTD
发明人
NAKAGAWA KIYOSHI;KUROIWA KEIZO
分类号
B05C11/08;H01L21/027;H01L21/30
主分类号
B05C11/08
代理机构
代理人
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