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发明名称
SEMICONDUCTOR MEMORY DEVICE
摘要
申请公布号
JPH0225055(A)
申请公布日期
1990.01.26
申请号
JP19880172729
申请日期
1988.07.13
申请人
HITACHI LTD;HITACHI VLSI ENG CORP
发明人
TSUKAGOSHI MAMORU
分类号
H01L21/82;H01L27/10
主分类号
H01L21/82
代理机构
代理人
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地址
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