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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0225032(A)
申请公布日期
1990.01.26
申请号
JP19880172713
申请日期
1988.07.13
申请人
HITACHI LTD
发明人
OKAWA AKIRA
分类号
H01L21/3205
主分类号
H01L21/3205
代理机构
代理人
主权项
地址
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