THIN FILM TRANSISTOR ARRAY

摘要

PURPOSE:To prevent the disconnection of picture element electrodes by providing comb tooth-shaped electrodes or extension-molded arm parts to drain electrodes or the upper electrodes of holding capacitors. CONSTITUTION:The comb tooth-shaped parts 7a are provided to the drain electrodes 7 and the picture element electrodes 9 formed by using ITO (indium tin oxide) are formed to cover the comb tooth-shaped parts 7a. The angles of the comb tooth-shaped parts 7a play the role of a weir to the etching soln. of the ITO infiltering along the steps at the ends of the electrodes 7 from the round marks in the figure at the time of patterning the electrodes 9. The infiltration of the etching liquid further to the inside is thus prevented and the disconnection of the electrodes 9 is decreased. The angles of the comb-shaped parts 7a are preferably provided as many as possible.