| 摘要 |
PURPOSE:To enable the boring of a reference hole in a substrate without giving mars to the surface of the substrate by a method wherein the centering of a reference mark is made in accordance with a set mode of a computer as a multilayer board is held as being sucked. CONSTITUTION:A vacuum hand 7 sucks a multilayer board B on a conveying face a of the conveyer 2 with a suction force of its sucking face at a sucking position on a conveyer 2. And, servomotors 13 and 14 start operating in accordance with a set mode of a computer 15 and move the hand 7 from a suction position to a centering position, and the board B is conveyed so as to make the reference mark of the board B positioned between an X-ray generating device 8 and a X-ray recognizing device 9. And, the motors 13 and 14 are made to operate depending on the direction from a console 20, which makes the centering operation of a reference mark B2 observing a monitor at the centering position, so as to enable the board B to make the centering of the reference mark B2. And, the hand 7 is made to move from the centering position to a hole boring position to bore a reference hole B1 in a reference mark position with a drill. |
