| 摘要 |
<p>PURPOSE:To simplify a wafer transport mechanism by fixing the axis of a tray-shaped disc and also the transport direction about fitting and removal of wafer, and allowing the transport direction to intersect at right angle with the inner surface of the disc periphery in its part where fitting and removal is made. CONSTITUTION:A tray-shaped disc 2 is rotatable round a horizontal axis, and a mounting jig 2a for wafer 1 is arranged on the same circumference at the inner surface of the peripheral edge. Cassette 6, loader 7, rotary table 8 and pushup tool 9 are in the same construction as any conventional arrangement. A transport device 10 reciprocates a wafer gripping part 10a situated at the tip associate with rotation of a link, grips the wafer 1, revolves it to the side perpendicular to the sheet of paper, allowing the wafer to confront the jig 2a and approach to perform reception and handover. When wafer is separated from the jig 2a, operation is made by following the procedures oppositely. In this device, the transport direction in fitting and removal of the wafer is fixed as it is while intersecting at right angles with the surface of the disc mounting jig 2a, wherein no inclination motion is made as in conventional arrangement, so that the structure is made simple and the fitting and removal operation simplified.</p> |
