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发明名称	ALINGNER
摘要
申请公布号	JPH0222808(A)	申请公布日期	1990.01.25
申请号	JP19880173606	申请日期	1988.07.11
申请人	SHARP CORP	发明人	NAKA SHUNICHI;YOSHIMURA FUMIO
分类号	H01L21/30;G03F7/20;H01L21/027	主分类号	H01L21/30
代理机构		代理人
主权项
地址

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