| 摘要 |
PURPOSE:To prevent the magnetic characteristic of an upper magnetic film from being deteriorated by keeping the angle of the oblique plane of an insulation film between a coil and the upper magnetic film constant by thinning the film thickness of the innermost and outermost peripheral parts of the coil less than that of other parts. CONSTITUTION:A base film 10 to set an electrode is formed on the insulator film 5, and the spin coating of a photoresist 11 is applied on the base film 10, and copper 12 is attached by a plating method. Each part 6a of the innermost and outermost peripheral parts is masked by a photoresist 13, and copper 14 is attached on the copper 12 by the plating method. After that, the coil 6 can be obtained by eliminating the photoresist 13 by an organic solvent, etc., and eliminating an unrequired part on the base film 10 by an ion etching method. In such a way, it is possible to form the film thickness of the part 6a of the innermost and outermost peripheral parts thinner than that of other parts 6b, and to keep the angle theta of the oblique plane of the insulation film 7 between the coil 6 and the upper magnetic film 8 constant, and to prevent the magnetic characteristic of the upper magnetic film 8 from being deteriorated. |
