A very-high-pressure transducer, particularly for detecting the pressure of a hydraulic fluid.

摘要

The transducer comprises a support structure (1,10,15) carrying piezoresistive sensors (8), particularly of the thick-film type, which are intended to be resiliently deformed by the fluid pressure to be measured and to provide an electrical signal indicative of the value of the pressure. The support structure comprises a substantially mushroom-shaped metal body (1) with a head (2) and a shank (3). An axial blind hole (4) is formed in the shank (3) and is intended to contain the fluid whose pressure is to be measured. The hole (4) also extends into the head (2) and, with the end surface of ti min e head, defines a wall (6) which is resiliently deformable by the pressure to be measured. The piezoresistive sensors (8) are connected to the end surface (2a) of the head (2) of the mushroom-shaped body (1) in correspondence with or adjacent the deformable wall (6) so that they can in turn be deformed as a result of the deformation of the wall. The sensors (8) are deposited on a thin plate (7) fixed to the upper surface of the head (2) of the mushroom-shaped body (1). The plate also carries the components (9) of the circuits for amplifying and processing the signals generated by the sensors (B). A metal structure (10,17) is also connected to the mushroom-shaped body (1) to screen it from radio-frequency interference.