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发明名称
METHOD FOR MEASURING DIMENSIONS OF FINE PATTERN
摘要
申请公布号
EP0238247(B1)
申请公布日期
1990.01.24
申请号
EP19870302042
申请日期
1987.03.10
申请人
FUJITSU LIMITED
发明人
MATSUI, SHOUGO;KOBAYASHI, KENICHI
分类号
G01B11/02
主分类号
G01B11/02
代理机构
代理人
主权项
地址
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