| 发明名称 |
Process for coating a substrate with metallic layer. |
| 摘要 |
<p>A metallic layer is coated onto a substrate by sputtering a layer of chromium followed by a layer of copper whereby the temperature of the substrate is at least about 320 DEG C.</p> |
| 申请公布号 |
EP0351533(A1) |
申请公布日期 |
1990.01.24 |
| 申请号 |
EP19890110200 |
申请日期 |
1989.06.06 |
| 申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
ANSCHEL, MORRIS |
| 分类号 |
C23C14/14;C23C14/18;C23C14/20;H01L23/12;H05K3/24;H05K3/38 |
主分类号 |
C23C14/14 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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