RESIST PEELING METHOD,申请号JP19880169451-传众专利搜索

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发明名称	RESIST PEELING METHOD
摘要
申请公布号	JPH0218931(A)	申请公布日期	1990.01.23
申请号	JP19880169451	申请日期	1988.07.07
申请人	MATSUSHITA ELECTRIC IND CO LTD	发明人	KAWAGUCHI TAKAO;MINAMINO YUTAKA;TAKEDA YOSHIYA;NAGATA SEIICHI
分类号	H01L21/302;H01L21/027;H01L21/30;H01L21/3065	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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