发明名称 SURFACE SHAPE MEASURING METHOD
摘要 PURPOSE:To converge laser light to a body surface and to utilize it as a signal which shows the shape of the body surface by irradiating a moving body with the laser light and detecting and converting its reflected light into an electric signal, and using it as a control signal. CONSTITUTION:Light from a laser light source 1 is passed through a lens 2, beam splitter 3, etc., and then reflected by a disk 8 to illuminate a photodetection surface 7 after changing in route by 90 deg. through the splitter 3. The photo- detection surface 7 is divided into four surfaces (a), (b), (c), and (d); when a point 9 coincide with a reflecting surface 8', the shape of the incident light is circular, but if it deviates to over or under the reflecting surface 8', the shape is elliptic having a long axis in a direction ac or bd. The driving system consisting of a differential amplifier 10, compensating circuit 11, etc., drives a driving motor 15 equipped with an objective lens 5 to make a convergent point 9 concident with the disk surface 8'. Meanwhile, the output of a power amplifier 12 is utilized as a signal for showing the surface shape.
申请公布号 JPS58122410(A) 申请公布日期 1983.07.21
申请号 JP19820003830 申请日期 1982.01.13
申请人 FUJITSU KK 发明人 MINAMI AKIRA;ARAI SHIGERU;SHIBATA ITARU;HAMADA MITSURU;OGAWA KOUICHI;MORIBE MINEO
分类号 G01B11/30;G01B11/24;G01B11/245 主分类号 G01B11/30
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