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发明名称
SURFACE MEASURING METHOD
摘要
申请公布号
JPH0219706(A)
申请公布日期
1990.01.23
申请号
JP19880168991
申请日期
1988.07.08
申请人
MITSUBISHI ELECTRIC CORP
发明人
CHIKUSHIMA CHIHIRO
分类号
G01B15/00;G01B15/08
主分类号
G01B15/00
代理机构
代理人
主权项
地址
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