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经营范围
发明名称
PROBE DEVICE
摘要
申请公布号
SU1538195(A1)
申请公布日期
1990.01.23
申请号
SU19874173389
申请日期
1987.01.05
申请人
BESSONOV YURIJ YA,SU;FOMIN IGOR A,SU;CHAPAJKIN VLADISLAV V,SU
发明人
BESSONOV YURIJ YA,SU;FOMIN IGOR A,SU;CHAPAJKIN VLADISLAV V,SU
分类号
H01L21/66
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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