| 摘要 |
PURPOSE:To conveniently handle a bonding device by opening a hole of small diameter axially at a wedge, providing means for evacuating in vacuum the interior of the hole and means for moving an arm fulcrum for supporting the wedge, thereby using it as a vacuum chuck and bonding irrespective of the electrostatic charge. CONSTITUTION:A wedge 1 can be utilized as a vacuum chuck. That is, when the switch 14 is set to positive direction and switches 13, 15 are closed, a vacuum pump 9 operates, the hole 1-1 of small diameter of the wedge 1 operates as a vacuum chuck, a fulcrum 11 is raised by a feeding shaft 10 by the normal rotation of a motor 12, and the fulcrum 11 operates as the fulcrum of a horn 2. Accordingly, the position of the fulcrum 11 is provided at the position adapted to be used as the vacuum chuck. On the other hand, when used as a bonding, the fulcrum 11 is lowered by reversely operating the switch 14 so that the fulcrum 5 operates as the fulcrum of the horn 2. Then, the fulcrum 5 is provided at the position where the pressure adapted for the bonding actuates on the lower surface of the wedge 1. |
