| 摘要 |
PURPOSE:To improve the sensitivity by forming a plasma polymerized film of alkylmercaptan on the surface of a quartz resonator. CONSTITUTION:A silver electrode 22 is attached in the center of a quartz surface 21 of a quartz resonator 24, and lead wires 23, 23' are connected to the quartz surface 21 and the silver electrode 22, respectively. Also, on the surface of the resonator 24, an alkylmercaptan plasma polymerized film is formed. By an action of a sulfone group generated by an action such as oxidation, ionization, radical generation, etc., of alkylmercaptan in this case, and a mercaptan thiol group, a humidity sensing characteristic is displayed, and the sensitivity can be raised.
|
