| 摘要 |
PURPOSE:To easily and with high accuracy set a sample by detecting directly the parallelism of a focus scanning plane of an ultrasonic beam and the surface of the sample as an intensity variation of an ultrasonic receiving signal and adjusting a sample holding base. CONSTITUTION:The title device is provided with a control part 1, high frequency pulse oscillator 2, circulator 3, transducer 4, acoustic medium 5, sample holding base 12, scanning part 13, SH circuit 14, standard voltage generator 15, differential amplifier 16, integration circuit 17 and a display device 18. By using that which has integrated a difference between ultrasonic receiving signal values in each point on the surface of a sample at the time when the surface of the sample 6 has been scanned linearly in one direction by an ultrasonic beam, and the maximum value among them, as an inclination signal of the sample surface, an inclination of the sample surface is detected directly as a variation of an ultrasonic receiving signal. Subsequently, by adjusting an inclination of the holding base 12 or the transducer 4 so that its inclination signal value shows a zero value, the parallelism of the focus scanning surface of the ultrasonic beam and the sample surface can be adjusted easily and with high accuracy. |
