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发明名称
MICROMANIPULATOR
摘要
申请公布号
JPH0219765(A)
申请公布日期
1990.01.23
申请号
JP19880169594
申请日期
1988.07.07
申请人
FUJI ELECTRIC CO LTD
发明人
KAWAMURA YUKINORI
分类号
G01N33/48;H01L41/08;H01L41/083;H01L41/09
主分类号
G01N33/48
代理机构
代理人
主权项
地址
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