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发明名称
SEMICONDUCTOR DEVICE AND ITS MANUFACTURE
摘要
申请公布号
JPH0215635(A)
申请公布日期
1990.01.19
申请号
JP19880165247
申请日期
1988.07.01
申请人
FUJITSU LTD
发明人
SUDO HAJIME
分类号
H01L21/60;H01L21/321;H01L27/14;H01L27/146
主分类号
H01L21/60
代理机构
代理人
主权项
地址
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