| 摘要 |
PURPOSE:To realize an apparatus whereby a given cross section of a fine structure device such as an LSI may be directly observed in a simplified fashion by a method wherein an apparatus for observing the cross section of a fine structure device being worked on is installed in one and the same atmosphere as a machining means and feeding/positioning means. CONSTITUTION:A specimen 4 is placed on a positioning stage 3 outside a vacuum chamber 1. A gate valve 2 is opened, a transfer stage 5 moves on a rail 6 into the vacuum chamber 1, the gate valve 2 is closed, and then the vacuum chamber 1 is evacuated. The transfer stage 5 moves on, to be positioned at a work point for a concentrated ion beam work unit 7. The positioning stage 3 goes into work and sets an observation point 4d at the ion beam work point. Next, the concentrated ion beam work unit 7 is actuated, to complete the work as specified. The carrier stage 5 further slides on until it is roughly positioned at an observation point 4a' for a scanning electron microscope unit 8. The positioning stage 3 trims the carrier stage 5 to a precise position for the observation of a worked cross section 4a'. A tilt stage 3a next tilts the specimen 4 for the scanning electron microscope unit 8 to observe the worked cross section 4a'. |
