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发明名称
MAGNETIC FIELD ENHANCING PLASMA ETCHING REACTOR
摘要
申请公布号
JPH0215623(A)
申请公布日期
1990.01.19
申请号
JP19890104374
申请日期
1989.04.24
申请人
发明人
分类号
H05H1/46;B01J3/02;H01J37/32;H01L21/00;H01L21/302;H01L21/3065
主分类号
H05H1/46
代理机构
代理人
主权项
地址
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