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发明名称
摘要
申请公布号
JPH027556(U)
申请公布日期
1990.01.18
申请号
JP19880086179U
申请日期
1988.06.29
申请人
发明人
分类号
G01N21/89;C23C2/00;C23C2/28;G01N21/892;(IPC1-7):G01N21/89
主分类号
G01N21/89
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