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经营范围
发明名称
MICROWAVE PLASMA CVD DEVICE
摘要
申请公布号
JPH0215174(A)
申请公布日期
1990.01.18
申请号
JP19880164205
申请日期
1988.07.01
申请人
CANON INC
发明人
KAWAKAMI SOICHIRO
分类号
C23C16/50;C23C16/27;C23C16/511;H01J37/32
主分类号
C23C16/50
代理机构
代理人
主权项
地址
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