Arrangement for generating signals for measuring the angular position of a tiltable mirror

摘要

Arrangement for generating signals for measuring the angular position of a tiltable mirror which is principally subjected to a continuous change in angular position, for example in optical beam deflectors. The arrangement permits measurement which is exclusively a function of the change in the angular position of the mirror, and also permits quick, high-resolution digital measurement. According to the invention, the object is achieved when the measuring light bundle emanating from a light source is projected onto the working side of a mirror. A spot (patch) of the measuring light bundle is preferably superimposed on a spot of a scanning light bundle, and a special grating plate is used as scale embodiment. <IMAGE>