WAERMEQUELLE FUER DAS CHEMISCHE VAKUUMBESCHICHTEN.,申请号DE19863667500-传众专利搜索

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发明名称	WAERMEQUELLE FUER DAS CHEMISCHE VAKUUMBESCHICHTEN.
摘要
申请公布号	DE3667500(D1)	申请公布日期	1990.01.18
申请号	DE19863667500	申请日期	1986.06.12
申请人	SPECTRUM CVD, INC., PHOENIX, ARIZ., US	发明人	BUNCH, MATTHEW LEROY, PHOENIX ARIZONA 85040, US;PRICE, J.B., SCOTTSDALE ARIZONA 85251, US;STITZ, ROBERT WILLIAM, MESA ARIZONA, 85204, US
分类号	C23C16/50;C23C16/48;C23C16/509;(IPC1-7):C23C16/46;C23C14/34;C23C16/52;H01L21/205	主分类号	C23C16/50
代理机构		代理人
主权项
地址

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