摘要 |
<p>PURPOSE:To improve the workability in element production by forming photodetecting parts on a solid-state image pickup element substrate and forming layers of color sepn. filters directly thereon. CONSTITUTION:The layer of a base material for the color sepn. filters is formed on the color solid-state image pickup element substrate 2 formed with the many photodetecting parts 10 and a driving circuit part 11 for driving said parts. Only the parts 2 of the 1st color of this layer are photoset and developed, by which only the parts 2 of the base material for the color sepn. filters are made to remain. These parts are dyed by a dye having a prescribed spectral characteristic. The surface is then coated with a transparent intermediate layer 5 and thereafter, the layer of the base material for the next color filters is formed and similarly the filter parts 3 for the 2nd color are formed and are dyed. Further, the surface is coated with a transparent intermediate layer 6 and the color filters 4 are similarly formed and are dyed; following which a protective film 7 is formed. The intermediate layer layers 5, 6 and the protective film 7 can be directly mounted on the substrate 1 by using the radiation sensitive org. high-polymer material having the spectral characteristics different from the spectral characteristics of the filter layers 2, 3, 4 and, therefore, the workability in element production is improved.</p> |