Method and device for determining the deviation of the energy of a particle probe from the neutral point energy

摘要

Due to the low capacitance of the circuit nodes of modern microelectronic components, quantitative measurements of potential with the electron probe should be carried out electrically load-free, that is to say charge-neutral. In conventional electron beam measuring devices the condition iPR = 0 (iPR = probe current), valid for electrically load-free measurements, can, however, be met only approximately by a suitable choice of the electron energy, since the neutral point energy of the measurement point is usually not known. It is therefore proposed to determine the deviation of the electron energy from the respective neutral point energy by measuring the effect of electron irradiation on the discharge behaviour of a capacitance. <IMAGE>