| 摘要 |
PURPOSE:To achieve a spectroscopic measurement of even a thick sample thoroughly into a narrow area by setting a pre-field stop in an optical system for irradiating a sample with a measuring light to form an image of the stop on the surface of the sample. CONSTITUTION:A pre-field stop 5 is arranged on an optical axis of an irradiation measuring light and an image of the pre-field stop 5 is formed on an incident surface of the measuring light of the sample 1 with a condenser mirror 2. With such an arrangement, an image 5' of the pre-field of view stop 5 is formed on a measuring surface of the sample 1 and an image 4' of the field stop (post-field stop) 4 is formed on the back, namely, a measuring light emitting surface as in the past. As a result, an outgoing measuring light passing through the field stop 4 passes through a narrow area given a shaded line and is provided with information on the part. This enables spectroscopic measurement of even a thick sample thoroughly into the narrow area. |
