| 摘要 |
PURPOSE:To easily and quickly separate a flat plate from a mask film body when the mask film body formed on the flat plate is transferred to a holder, by providing a metal layer between the mask film body and the flat plate. CONSTITUTION:After a mask film body 6 composed of X-ray transmitting layers 3, 5 and an X-ray absorber 4 is formed on a flat plate 1, the mask film body 6 is fixed on a retaining body 7, the flat plate 1 is separated from the mask body 6, and the mask film body 6 is transferred to the retaining body 7 to form a mask for X-ray lithography. At this time, a metal layer 2 is arranged between the mask film body 6 and the flat plate 1, thereby facilitating the separation of the mask body 6 and the flat plate 1. For example, the above metal layer 2 contains one or more kinds of gold, silver, tin, platinum, palladium and rhodium, and is formed by using vacuum heating deposition method, sputtering method, etc. After the metal layer 2 is dipped in solvent, and the flat plate 1 and the metal layer 2 are separated, the metal layer 2 is eliminated by a method such as dissolving elimination and plasma etching. |
